EDA Industries is a leader in Package Level Burn-in & Reliability Test Equipment for the semiconductor industry.
The ETNA solution summarizes 30 years of experience, being the ideal platform to carry out R&D, Q&R and production tests for the main families of devices, included SiC & GaN, Power Modules, SoC, MEMS and Memories.
The ETNA MOSBTS-M180 is focused on High Voltage and is the EDA solution for Burn-in on SiC and GaN devices and Power Modules.
Main features
Same Test and Software Platforms for Wafer Level and Package Level Burn-in
- Extended Data-Logging and Correlation Capability
- Tracking of the Device’s whole History
Mixing of HTRB and HTGB stress in the same Test Flow
- Speed up of Burn-in time reduction process with significant impact on overall manufacturing costs
Leakage Measurement Capability
- Drift monitoring to predict device failure
- Technology learning curve optimization
Massively Parallel Architecture
- Up to 4320 Devices stressed and tested in parallel in the 12+12 configuration
State-of-the-art thermal platform
- Industry 4.0 Compliant
- Green solution
- Automation ready
- Hot-Cold configuration for Reliability characterization activities
Data Analysis SW Tool
- Real Time monitoring enabling Burn-in Adaptive Strategy
- Post processing analysis for feedback to R&D, Product Quality and Reliability, Manufacturing
Test platform main features
- Electrical Zones/Chamber: Up to 6
- DUT / Slot: Up to 180
- Test List at Full Parallelism: HTRB/IDSS, HTGB/IGSS, IDSX, BVDSS
- Multiplexed In-Situ Measurement: Vth, RDSon, Vsd
- Drain PSU Range: [-60V; 2500V] DC, +/-500V AC
- Gate PSU Range: [-60V to 60V]
- Monitoring: DUT Current (A) Real-Time of all 180 DUTs in parallel
- Current Measure Range: [600nA – 100uA – 50mA]
- Current Measure Accuracy: [6nA – 1uA – 250uA]
- Force Current Range (parametric multiplexed test): Up to 200mA
- Failure Time Log Resolution: 1ms
High Voltage Model
- Output Voltage Range: 0 V to + 2500V
- Output Voltage Setting Accuracy: 0.05% of actual + 0.05% of rated Vout
- Output Current Range: 0 A to 1.25 A
- Maximum Output Power: 3250 W
- Ripple and noise (p-p, 20 MHz bandwidth, without load): < 250 mV
Low Voltage Model
- Output Voltage Range: 0 V to + 60V
- Output Voltage Setting Accuracy: ±0.15% of rated Vout
- Output Current Range: 0 A to 17 A
- Maximum Output Power: 1020 W
- Ripple and noise (p-p, 20 MHz bandwidth, without load): < 60 mV
Thermal platform main features
- Number of Chambers/Equipment: 2
- BIB slots: 24 (12 for each chamber)
- Max Temperature range: from -45°C up to 200°C
- BIB insertion/extraction: Automatic, at slot level
- Chamber doors opening: Automatic. Sliding doors with inflatable gasket
- Temperature Setting Resolution: 0,1°C
- Temperature Setting Accuracy: ±1°C
- Temperature Uniformity: ±3°C (Valid in the range [-45; 150]°C @max. heat dissipation, with 12 Bibs loaded. Measurement points at 100 mm offset from chamber wall and 10 mm close to DUT)
- Max Dissipation @150°C per Chamber: 5KW /7,5 KW
- Max Dissipation @-45°C per Chamber: 2,5KW / 3,5 KW
- Condensation: Water
- N2 Management Option: Available
Software platform main features
The system’s Software Test Environment provides the complete set of tools for Test development (SW Development package), Production execution and Reporting (SW Execution package).
With its rich set of graphical user interface, the ETNA MOSBTS-M180 software offers the engineering tools necessary to characterize devices, as well as develop and debug test programs quickly and efficiently.
Pattern Editor
- New IDE for pattern viewer and editor based on EDA platform vectors
- Easy Test program generation
Test Plan Editor
- Features for easier engineering activities
- Easier operator interface
Data Viewer
- Powerful data reporting and analysis, which includes dedicated Burn-in data format and STDF output
- Run-time access to test-flow step, parameter and measures
- Detailed report on the analyzed data
Contact us
In addition to the significant existing products’ portfolio, EDA Industries is specialized in meeting specific customer requests by customizing its solutions or by designing new ones.
For further info, please send a direct request to sales@eda-industries.com